ACT-3100A is a CT system independently developed by X3000 Inspection for fast, high-precision X-ray and CT scanning reconstruction of large-size flat products including advanced packaging components such as wafer-level packaging, panel-level packaging, and TGV glass substrates, serving as a direct alternative to the Q-series products of a certain imported brand.

Equipped with self-developed high-performance CT reconstruction algorithms and a high-precision marble motion platform, the system enables CT imaging with a resolution up to 1 micron.

In addition, the equipment can be integrated with a customized wafer and chip handling system to support automatic or semi-automatic inspection workflows.

Category	Item	Parameter
Imaging System	CT System Resolution	≥1μm
	DR System Resolution	0.25μm/0.45μm
	Inspection Mode	2D & 2.5D & 3D
	Software	Self-developed software by Gongyuansanqian (Customizable for diverse requirements) Volume Graphic (Optional)
X-ray Source	Tube Type	Open Transmission Tube
	Tube Voltage	160kV
	Focal Spot Size	0.5μm/0.9μm
Detector	Detector Type	Flat Panel Detector
	Pixel Size	49.8μm
	Pixel Matrix	2340×2813
Motion Control System	Inspection Range	510mm×515mm (Customizable)
	Automatic Navigation	Records coordinate positions and parameters of feature points to enable fast movement to inspection positions
	Control Mode	Mouse, Keyboard, Joystick, Software
	Scanning Motion Mode	2×70°, 360° orbital rotation inspection for test points
Overall Specifications	Overall Dimension	L:1591mm W:1560mm H:2012mm (Excluding three-color warning light, subject to final design)
	Net Weight	Approx. 3500KG
	Rated Power	Approx. 8kW (Subject to final design)