Wuxi Baitongda Technology Co., Ltd

ACT-2100

ACT-2100 ptically Coupled Microscopy CT

Product Features：

◈ Ultra-High Resolution

Adopting the innovatively developed optically magnified objective-coupled detector technology, the system achieves submicron-level spatial resolution ranging from 100 nm to 1000 nm.

◈ High-Precision Linear Encoder Equipped

The built-in high-accuracy linear grating scale guarantees precise positioning between components, high linear movement accuracy as well as excellent long-term operational stability.

Product Introduction：

ACT-2100 is an ultra-high-resolution micro-CT system independently developed by X3000 InspectionTechnology, specifically tailored for advanced semiconductor packaging processes and academic research scenarios.

Equipped with our fully self-developed optically magnified objective-coupled detector, this system delivers a maximum spatial resolution of 0.4 μm (400 nm), enabling the inspection of nanoscale defects on 2.5D/3D packaging, memory chips and other related products.Beyond semiconductor applications, this instrument is also widely deployed for research across diverse disciplines including medicine, pharmacy, biology, archaeology, material science, electronics and geology.

Applicable fields：

◈ Semiconductor Industry

Detect nanoscale solder voids, delamination, wiring defects and other flaws formed during chip packaging.

◈ Medical, Pharmaceutical & Biological Research

Observe the internal structure of drug particles, the distribution of drug delivery systems, osteocyte lacunae, microcapillary network details, as well as specific organelles (in combination with staining or fluorescent labeling techniques).

◈ Archaeology

Examine nanoscale soft tissue traces preserved in fossils, ultra-fine craft features or internal corrosion of cultural relics.

◈ Material Science

Analyze the structure of nanocomposites, inspect submicron pores and cracks (critical for high-performance materials and additive manufactured parts), and characterize nanoparticles.

◈ Geology

Measure nanoscale pores in samples (vital for the evaluation of shale gas and tight oil reservoirs) and investigate micro-fracture networks.

Parameter Introduction：

Category	Item	Parameters
Imaging System	System Ultimate Resolution	400nm
	Imaging Mode	2D & 3D
	Software	Self-developed CT Software by Gongyuan Sanqian (Customizable for diverse requirements); Volume Graphic (Optional)
X-ray Source	Tube Type	Open-Type Transmission Nano Focus Tube
X-ray Source	Tube Voltage	160kV/190kV/225kV/240kV/300kV
Detector	Detector Type	Flat Panel Detector
	Pixel Size	99μm
	Pixel Matrix	3072 * 3072
Motion Control System	Max. Scanning Range	Ø300×300mm (Customizable for different requirements)
Motion Control System	Maximum Sample Weight	20KG
Overall Specifications	Dimension	L: 2000mm W: 1500mm H: 1800mm (Excluding three-color warning light, subject to final design)
	Weight	Approx. 5000KG
	Power Rating	Approx. 10kW, subject to final design
Optical Coupled Detector (Optional Upgrade)	Magnification	4×, 10×, 20× Optical Lenses